According to the temperature parameters of growth system for semiconductor thin film, a method to calibrate the thin film growth temperature by ECR-PEMOCVD based on double thermocouple is introduced. 通过简单叙述Ⅲ族GaN基氮化物薄膜,以及了解半导体薄膜生长系统的温度变化情况重要性,提出了基于双热电偶校准薄膜生长装置ECR-PEMOCVD温度的方法。
Applied Thermocouple Transmitter to the Production of Semiconductor The Intelligent Thermocouple mV Producing Instrument 热电偶传感器在半导体生产中的应用及误差分析